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当前位置:仪器网>产品中心> 北京欧兰科技发展有限公司>微定位位移台>MCL 纳米升降位移台HSZ
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MCL 纳米升降位移台HSZ

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详细介绍


Features
  • Single axis (Z) motion

  • Step response less than 1 millisecond

  • Scans up to 500 Hz

  • Closed loop control

  • Combine with Nano-OP Series for multi-axis configurations



Typical Applications
  • High speed, high resolution positioning

  • Metrology

  • Interferometry



Product Description

The Nano-HSZ is a high speed single axis (Z-axis) precision nanopositioning system. Internal position sensors utilizing proprietary PicoQ®technology provide absolute, repeatable position measurement with picometer accuracy under closed loop control. The Nano-HSZ offers a compact footprint, ultra low noise characteristics, and a resonant frequency greater than 7 kHz. These characteristics make it ideal for applications that require noise floors less than 10 picometers and/or high speed performance. With the step response time of the Nano-HSZ set to less than 1 millisecond for extremely high speed applications, scan frequencies up to 500Hz can be achieved.



Nano-HSZ Position Noise Spectrum



Technical Specifications

Range of motion (Z)10 μm
Resolution
0.01 nm
Resonant Frequency7.5 kHz ±20%
Scanning Speed (full amplitude)up to 500 Hz
Stiffness12 N/μm
Recommended max. load (horizontal)*0.1 kg
Recommended max. load (vertical)*0.1 kg
Body MaterialAl, Invar or Titanium
ControllerNano-Drive®
* Larger load requirements should be discussed with our engineering staff.



Additional Information

Nano-HSZ Drawing

Nano-HSZ Catalog Pages



Related Products

  • Nano-METZ

  • Nano-HS Series

  • Nano-ZS Series

  • Nano-Z50HS Series

  • Nano-MZ

  • Accessories

  • Nano-Drive®


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