-
-
薄层方块电阻测量仪-非接触式
- 品牌:昊量/auniontech
- 型号: EddyCus TF Lab 2020SR
- 产地:徐汇区
- 供应商报价: 面议
-
上海昊量光电设备有限公司
更新时间:2024-08-12 10:55:59
-
企业性质授权代理商
入驻年限第4年
营业执照已审核
- 同类产品电涡流检测(4件)
联系方式:贺先生156-01689581
联系我们时请说明在仪器网(www.yiqi.com)上看到的!
-
为您推荐
- 详细介绍
昊量光电新推出用于导电薄膜和薄金属层方块电阻测量的非接触式薄膜四方针方块电阻方阻测量仪EddyCus TF Series,这款非接触式薄膜四方针方块电阻方阻测量仪可以非接触式实时测量,对导电薄膜和金属方块电阻精确测量,表征已被隐藏和封装的导电层,并把测量数据保存和导出。 可用于方块电阻,方阻测量,四探针测试,四探针方阻测量。
非接触式薄膜四方针方块电阻方阻测量仪主要测试对象:
镀膜建筑玻璃,如LowE
显示器,触摸屏和平板显示器
OLED和LED
智能玻璃
石墨烯层
光伏晶圆和电池
半导体晶片
金属化层和晶圆金属化
电池电极
导电涂布纸和导电纺织品
非接触式单点方阻测试仪EddyCus TF Lab 2020SR
EddyCus TF Lab 2020SR是非接触式单点薄层电阻测量系统。该装置包含一个涡流传感器组,感应弱电流到导电薄膜和材料。非接触式薄膜四方针方块电阻方阻测量仪试样中的感应电流产生与测量对象的片电阻相关的电磁场。电涡流技术不依赖于表面特征或形貌。此外,非接触式单点方阻测试仪不需要如已知的2或4点探针测试(2PP, 4PP)或霍尔效应或范德波测量一样进行任何形式的充分的样品接触或备样。非接触式单点方阻测试仪既不需要设置测试结构,也不受表面粗糙度或非导电封装或钝化层的影响。此外,测量不会对被测薄膜产生物理影响。涡流仪器不存在机械磨损,使用寿命长。它的独立性与接触质量和它的高速允许实现高重复性和准确性,有利于在研发和测试实验室的各种薄膜的系统质量保证。EddyCus工具可以由具有各种数据记录和导出功能的SURAGUS软件驱动,也可以由SURAGUS软件开发套件驱动的客户软件驱动。
非接触式单点方阻测试仪软件和设备控制:
非常用户友好的软件
直观的触摸显示导航
实时测量板材电阻和层厚
软件辅助手动映射选项
各种数据保存和导出选项
非接触式薄膜四方针方块电阻方阻测量仪产品规格表
Measurement technology Non-contact eddy current sensor substrates Foils, glass, wafer, etc. Substrate area 8 inch / 204 mm x 204 mm (open on three sides) Max. sample thickness / sensor gap 3 / 5 / 10 / 25 mm (defined by the thickest sample) Thickness measurement range of metal films (e.g. copper) 2 nm – 2 mm (in accordance with sheet resistance (cf. our calculator)) Device dimensions (w/h/d) 11.4” x 5.5” x 17.5” / 290 mm x 140 mm x 445 mm Weight 10 kg Further available features Sheet resistance measurement / metal thickness monitor VLSR LSR MSR HSR VHSR 6 decades are measurable by one sensor, but with slightly affected accuracy Range [Ohm/sq] 0.0001 – 0.1 0.1 – 10 0.1 – 100 10 – 2000 1,000 – 200,000 Accuracy / Bias ± 1% ± 1 – 3% ± 3 – 5% Repeatability (2σ) < 0.3% < 0.5% < 0.3% VLSR – Very Low Sheet Resistance , LSR – Low Sheet Resistance , MSR – Medium Sheet Resistance , HSR – High Sheet Resistance , VHSR – Very High Sheet Resistanc 非接触式薄膜四方针方块电阻方阻测量仪
非接触式方阻成像仪EddyCus TF Map 2530SR
EddyCus TF Map 2530SR是一种非接触式薄层电阻映射系统。该设备配备了一个运动的涡流传感器,每次扫描可测量高达90000 (300 x 300)测量点的方块电阻。由于这种技术不需要与标本进行物理接触,该设备可以在飞行运动中进行测量。此外,非接触式单点方阻测试仪具有很高的准确性,因为它是独立于任何接触质量。非接触式薄膜四方针方块电阻方阻测量仪样品中测量点的高密度确保了没有遗漏任何效果或缺陷。此外,综合分析功能支持生产和研发实验室中各种薄膜的系统质量保证。
产品规格:
Measurement technology Non-contact eddy current sensor Substrates Wafer, glass, foils etc. Max. scanning area 12 inch / 300 mm x 300 mm (larger upon request) Edge effect correction / exclusion 2 – 10 mm (depending on size, range, setup and requirements) Max. sample thickness / sensor gap 3 / 5 / 10 / 15 mm (defined by the thickest sample) Thickness measurement of metal films (e.g. aluminum, copper) 2 nm – 2 mm (in accordance with sheet resistance ()) Scanning pitch 1 / 2.5 / 5 / 10 / 25 mm (other upon request) Measurement points per time (square shaped samples) 100 measurement points in 0.5 minutes
10,000 measurement points in 3 minutesScanning time 8 inch / 200 mm x 200 mm in 1 to 10 minutes (1 – 10 mm pitch)
12 inch / 300 mm x 300 mm in 2 to 6 minutes (2.5 – 25 mm pitch)Device dimensions (w/h/d) 31.5” x 19.1” x 33.5” / 785 mm x 486 mm x 850 mm Weight 90 kg Further available features Metal thickness imaging, anisotropy and sheet resistance sensor VLSR LSR MSR HSR VHSR 6 decades are measurable by one sensor, but with slightly affected accuracy Range [Ohm/sq] 0.0001 – 0.1 0.1 – 10 0.1 – 100 10 – 2,000 1,000 – 200,000 Accuracy / Bias ± 1% ± 1 – 3% ± 3 – 5% Repeatability (2σ) < 0.5% < 1% < 0.5% VLSR – Very Low Sheet Resistance , LSR – Low Sheet Resistance , MSR – Medium Sheet Resistance , HSR – High Sheet Resistance , VHSR – Very High Sheet Resistance 便携式方块电阻测试仪
EddyCus TF便携式1010SR专用于工业环境中的接触片电阻测量。它使各种行业的手工质量保证成为可能。
Measurement technology Eddy current sensor Measurement mode Realtime at constant distance / contact Substrates Glass, foils etc. Substrate sizes Flat samples > 150 mm x 150 mm (6 inch x 6 inch)
Curved editions are available for several applications (windshields etc.)Measurement spot / high sensitivity zone 40 mm diameter (1.6 inch) Power Lithium ion battery up to 20 h Sheet resistance range (five setups available) Type very low: 0.001 – 0.1 Ohm/sq
Type low: 0.04 – 0.1 Ohm/sq
Type standard: 0.3 – 30 Ohm/sq
Type high: 0.3 – 50 Ohm/sq
Type very high: 0.3 – 100 Ohm/sqThickness measurement of thin films (e.g. copper) Additional feature, available range is 5 nm – 500 µm (in accordance with sheet resistance) Emissivity range Additional feature, available range is 0.003 – 0.5 Accuracy (for planar solid surfaces, e.g. glass) 0.001 – 50 Ohm/sq: < 3%
50 – 100 Ohm/sq: < 5%DISPlay 2.8 inch colored touch screen Device dimensions (w/h/d) 3.5” x 7” x 1.9” / 87 mm x 178 mm x 48 mm Weight 340 g Interfaces Bluetooth (optional) + data center - 产品优势
- 非接触测量方块电阻,高速,高精度,低备样需求