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仪器/ 产品中心/ 光学仪器/ 光学元件/ 位移台/ MCL 纳米双轴、三轴位移台HS系列
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MCL 纳米双轴、三轴位移台HS系列

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详细介绍


Features
  • High speed, multi-axis

  • XY and XYZ configurations

  • Z-axis step response time down to 2ms

  • Z-axis scans up to 300 Hz

  • Closed loop control

  • Picometer positioning resolution

  • High stability



Typical Applications
  • High speed, high resolution positioning

  • Metrology

  • AFM

  • SPM




Product Description

The Nano-HS Series is a high speed, multi-axis, precision nanopositioning system with picometer positioning resolution. Offering maximum versatility, the Nano-HS can be configured to provide XY or XYZ motion. Internal position sensors utilizing proprietary PicoQtechnology provide absolute, repeatable position measurement under closed loop control. The compact footprint, ultra-low noise characteristics, and a Z-axis resonant frequency of 5kHz make it ideal for metrology applications that require noise floors less than 10 picometers and/or high speed performance. The Nano-HS2 is an ideal high speed XY scanning stage for use with theMadPLLsystem. See theSPM-M Kitfor an example of how to combine Mad City Labs equipment to build an AFM or NSOM. For an XYZ system with even higher speed Z, see theNano-HS3M.



Technical Specifications

Range of motion (XYZ)10 μm
Resolution
0.01 nm
XY (HS2) Resonant Frequency1.5 kHz ±20%
XY (HS3) Resonant Frequency1.0 kHz ±20%
Z (HS3) Resonant Frequency5.0 kHz ±20%
Scanning Speedup to 300 Hz
Stiffness (Z-axis)8 N/μm
Recommended max. load (horizontal)*0.1 kg
Recommended max. load (vertical)*0.1 kg
Body MaterialAl, Invar or Titanium
ControllerNano-Drive
* Larger load requirements 首ld be discussed with our engineering staff.



Position Noise Spectrum

The Nano-HS Series demonstrates less than2 picometersof position noise on all three axes. Click below to enlarge and view the data for each axis.


X-Axis


Y-Axis


Z-Axis




Additional Information

Nano-HS2 Drawing


Nano-HS3 Drawing

Nano-HS Series Catalog Pages



Related Products

  • Nano-HS3M

  • Nano-HSZ

  • Nano-LPQ

  • Nano-PDQ Series

  • Nano-Man5

  • Nano-M350

  • Nano-MZ

  • Nano-3D200

  • Accessories

  • Nano-Drive

  • MadPLLInstrumentation for AFM/NSOM

  • SPM-M Kit Build Your Own AFM/NSOM


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