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MCL 提示/倾斜、旋转纳米位移台Align6系列
- 品牌：美国MCL Think Nano
- 型号： Nano-Align6 Series
- 产地：美国
- 供应商报价： 面议
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北京欧兰科技发展有限公司
更新时间：2022-03-04 17:31:39 -
企业性质
入驻年限第4年
营业执照
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- 详细介绍
Features Low profile
Six axis motion (XYZ θXθYθZ)
100 μm x 100 μm x 100 μm x 1.1 mrad x 1.5 mrad x 5 mrad ranges of motion
200 μm x 200 μm x 200 μm x 2.3 mrad x 3.0 mrad x 5 mrad ranges of motion
Center aperture: 35mm diameter
Closed loop control
Typical Applications Alignment
MEMS
Nanolithography
Metrology
Product Description
The Nano-Align6 is a six axis (X, Y, Z, θX, θY, θZ) nanopositioning system with a large center aperture. The Nano-Align6 is ideal for alignment applications which require three linear axes of motion (X, Y, Z) combined with rotational motion about each axis. The large aperture provides excellent access for microscopy optics, sample holders, and probe placement. The Nano-Align6 includes internal sensors on every axis using Mad City Labs’ proprietary PicoQtechnology for absolute position measurement and picometer/nanoradian accuracy under closed loop control. 
Technical Specifications
Ranges of motion (Nano-Align6-100) 100 x 100 x 100 μm x 1.1 mrad (θX) x 1.5 mrad (θY) x 5 mrad (θZ) Ranges of motion (Nano-Align6-200) 200 x 200 x 200 μm x 2.3 mrad (θX) x 3.0 mrad (θY) x 5 mrad (θZ) Resolution (Nano-Align6-100) 0.2 nm (XYZ), 2.2 nrad (θX), 3.0 nrad (θY), 10 nrad (θZ) Resolution (Nano-Align6-200) 0.4 nm (XYZ), 4.6 nrad (θX), 6.0 nrad (θY), 10 nrad (θZ) Resonant Frequencies X axis (Nano-Align6-100/Nano-Align6-200) 450/400 Hz ±20% Y axis (Nano-Align6-100/Nano-Align6-200) 350/300 Hz ±20% Z axis (Nano-Align6-100/Nano-Align6-200) 450/350 Hz ±20% Recommended max. load (horizontal)* 0.5 kg Recommended max. load (vertical)* 0.2 kg Body Material Aluminum, Titanium or Invar Controller Nano-Drive * Larger load requirements 首ld be discussed with our engineering staff. Additional Information
Nano-Align6 Series Drawing 
Nano-Align6 Series Catalog Pages 
Related Products
Nano-Align3 Series
Nano-Align5 Series
Nano-Man5
Nano-M3Z
Nano-Theta/H
Accessories
Nano-Drive
