RF output specifications
Frequency 13.56 MHz ±0.005%
Minimum output power 10 W
Note: The CESAR generator can operate below
this level, but accuracy is not guaranteed.
Maximum output power 1 kW
Delivered power into
mismatch
16% of nominal power
Maximum reflected
power
200 W
Load Impedance 50 Ω
Harmonics At full rated output, all harmonics are 50 dB below
the RF output signal when operated into a 50 Ω,
nonreactive load impedance. All spurious
(nonharmonic) outputs are 60 dB below the RF
output signal.
RF Power Regulation 1.0% of set point or 0.1% of full rated power,
whichever is greater
RF Power Stability 1.0% of set point or 0.2% of full rated power,
whichever is greater
RF Power Response
Time
For detailed specifications of RF waveforms, see
www.dressler.com/products/generators.
RF Pulse frequency 1 Hz to 30 kHz
RF Pulse Duty Cycle 0% to 99%
CEX Specifications
CEX input signal TTL; 0 to +10 dBm; 50 Ω
CEX output signal TTL ; +3 to +10 dBm; 50 Ω
Cooling medium Air
Minimum air flow 118 m 3 /h (69.45 cfm)
高质量的组件和较少的零件数量使可靠性和产品生命周期均实现Z优化,从而使您的投资和制程生产力得到Z大化的利用。一个全面而高度灵敏的操作菜单(可在该组件的多功能前面板上找到,并显示在一个大的液晶显示屏上)带来了无与伦比的便利性——提高了操作人员的效率,并使培训成本Z小化。
优点 功能
更长的制程正常运行时间
更高的操作简易性和灵活性
无需定制组件提前期的定制化性能
长期的使用简易性,节省成本
世界级的服务和支持
精簡的流线型设计
标准的平台包装
高效率——低发热量
200和400 VAC 的输入选择
两个模拟用户端口选择
RS-232、以太网、和 Profibus 通讯
多功能前面板
便利、全面的操作菜单
CEX(相位同步)操作模式
遵循 SEMI™(符合或超过标准)
- 产品分类
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仪企号
中山市枭射频科技有限公司
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友情链接