射频功率发生器，射频电源

RF output specifications

Frequency 13.56 MHz ±0.005%

Minimum output power 10 W

Note: The CESAR generator can operate below

this level, but accuracy is not guaranteed.

Maximum output power 1 kW

Delivered power into

mismatch

16% of nominal power

Maximum reflected

power

200 W

Load Impedance 50 Ω

Harmonics At full rated output, all harmonics are 50 dB below

the RF output signal when operated into a 50 Ω,

nonreactive load impedance. All spurious

(nonharmonic) outputs are 60 dB below the RF

output signal.

RF Power Regulation 1.0% of set point or 0.1% of full rated power,

whichever is greater

RF Power Stability 1.0% of set point or 0.2% of full rated power,

whichever is greater

RF Power Response

Time

For detailed specifications of RF waveforms, see

www.dressler.com/products/generators.

RF Pulse frequency 1 Hz to 30 kHz

RF Pulse Duty Cycle 0% to 99%

CEX Specifications

CEX input signal TTL; 0 to +10 dBm; 50 Ω

CEX output signal TTL ; +3 to +10 dBm; 50 Ω

Cooling medium Air

Minimum air flow 118 m 3 /h (69.45 cfm)