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当前位置:仪器网>产品中心> 北京欧兰科技发展有限公司>微定位位移台>MCL 三轴纳米位移台HS3M
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MCL 三轴纳米位移台HS3M

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详细介绍

Features
  • High speed

  • Low noise floor

  • Closed loop control

  • Picometer positioning resolution

  • High stability

  • Compact design



Typical Applications
  • High speed, high resolution positioning

  • Metrology

  • AFM

  • SPM


Product Description

The Nano-HS3M is a high speed, XYZ precision nanopositioning system with picometer positioning resolution. Offering maximum versatility, the Nano- HS3M is designed for demanding metrology applications. Internal position sensors utilizing proprietary PicoQ®technology provide absolute, repeatable position measurement under closed loop control. The compact footprint, ultra-low noise characteristics, and a Z-axis resonant frequency of 13.5kHz make it ideal for metrology applications that require picometer noise floors and high speed performance.


Technical Specifications

Range of motion (XY)10 μm
Range of motion (Z)5 μm
Resolution
0.01 nm
Resonant Frequency (X)1.6 kHz
Resonant Frequency (Y)1.5 kHz
Resonant Frequency (Z)13.5 kHz
Recommended max. load (horizontal)*0.1 kg
Recommended max. load (vertical)*0.1 kg
Body MaterialAluminum or Titanium
ControllerNano-Drive®
* Larger load requirements should be discussed with our engineering staff.


Related Products

  • Nano-MET Series

  • Nano-MET10 & Nano-MET20

  • Nano-HS Series

  • Nano-M350

  • Nano-METZ

  • Accessories

  • Nano-Drive®

  • MadPLL® Instrumentation for AFM/NSOM

  • SPM-M Kit Build Your Own AFM/NSOM


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