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原子力显微镜

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原子力显微镜 核心参数
空间分辨率 0.02nm 样品尺寸 150mm*150mm
样品台移动范围 150mm*150mm

产品特点

大样品台,全自动原子力显微镜

详细介绍

Park XE15 Specifications

 

ScannerZ Scanner

Guided high-force flexure scanner

Scan range : 12 µm (optional 25 µm)
Height noise level: 50 pm 
(RMS, at 0.5 kHz bandwidth)

 

XY Scanner

Single module flexure XY-scanner with closed-loop control

Scan range : 100 µm × 100 µm

 
Stage

Z stage range : 25 mm (Motorized)
Focus travel range : 20 mm (Motorized)
Optional precision encoders for repeatable XY positioning
XY stage travel range : 150 mm x 150 mm (Motorized)

 
Sample Mount

Sample size : Open space up to 150 mm x 150 mm, thickness up to 20 mm (optional 200 mm) 
Sample weight : < 500 g

 
Optics

10x (0.28 NA) ultra-long working distance lens (1 µm resolution)
Direct on-axis vision of sample surface and cantilever
Field-of-view : 480 × 360 µm (with 10× objective lens)
CCD : 1 M pixel, 5 M pixel (optional)

 
SoftwareSmartScan™

Dedicated system control and data acquisition software
Adjusting feedback parameters in real time
Script-level control through external programs (optional)

 

XEI

AFM data analysis software (running on Windows, MacOS X, and Linux)

 
Electronics

High performance DSP : 600 MHz with 4800 MIPS
Maximum 16 data images
Maximum data size : 4096 × 4096 pixels
Signal inputs : 20 channels of 16 bit ADC at 500 kHz samplings
Signal outputs : 21 channels of 16 bit DAC at 500 kHz settling
Synchronous signal : End-of-image, end-of-line, and end-of-pixel TTL signals
Active Q control (optional)
Cantilever spring constant calibration (optional)
CE Compliant
Power : 120 W
Signal Access Module (Optional)


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