Nanoindentation is a simple and effective means for evaluating the mechanical properties of thin films. In the method, the applied load, P, and the penetration depth, h, of the indenter are continuously monitored, and the mechanical properties are determined from the thus obtained P-h relationship. For evaluating the intrinsic mechanical property of a thin film layered on a substrate, as a rule of thumb, the penetration depth 首ld be less than one tenth of the film thickness. However, the precise indentation measurement on one-tenth of the film thickness is impossible for 10 nm order thickness films.
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