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认证会员 第 5 年
铂悦仪器(上海)有限公司
认证:工商信息已核实
- 产品分类
- 品牌分类
- ( 德国)德国PHYNIX
- ( 英国)英国西沃德
- ( 日本)日本理学
- ( 美国)美国Frontier Semiconductor
- ( 德国)德国OILPAS
- ( 美国)美国Semiconsoft
- ( 波兰)波兰SMARTTECH
- ( 德国)德国Mahr
- ( 瑞典)瑞典COX AnalyticalSystem
- ( 法国)法国RX Solutions
- ( 德国)德国布鲁克
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仪企号铂悦仪器(上海)有限公司
品牌: | 德国布鲁克 | 型号: | Characterization |
电学特性
FEOL Electrical Characterization
In IC device manufacturing electrical characteristics of layers and films must be well controlled. Conventional contact test methods on monitor wafers, like the 4-point probe FSM offers, do no longer meet modern requirements. State of the art IC feature extremely thin, often only a few atomic layers of material. FSM's contactless RsL probe for sheet resistance and leakage as well as the non-destructive EOT probe for IC-CV measurements meet the challenge to characterize ultra shallow junctions and thin dielectric materials on production wafers.
FSM offers contact and non-contact electrical characterization metrology used in FEOL device making.
3DIC TSV and BWS TTV硅片表面形貌测量
Film Stress薄膜应力量测仪
FEOL Electrical Characterization 电学特性
Thin wafer metrology 晶圆测量学
Film Adhesion漆膜附着力测试
FSM offers contact and non-contact electrical characterization metrology used in FEOL device making.